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US 2017/0248479 A1Published application
Sensor device, sensor module, force detection device, and robot
AssigneeSeiko Epson Corporation
InventorsToshiyuki KAMIYA, Hiroki KAWAI
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Abstract
A package having a recessed section, a sensor element arranged in the recessed section and having a piezoelectric material, a lid joined to the package and sealing the recessed section of the package are provided. The package has a first hollow portion which a part of the sensor element fits with, on an inner bottom surface of the recessed section. The lid has a second hollow portion which a part of the sensor element fits with.
Claims20
A force detection device comprising:
- a first plate;
- a second plate;
- a sensor device between the first plate and the second plate;
- wherein the sensor device includes
- a first member having a recessed section,
- a sensor element having piezoelectric material and arranged in the recessed section,
- wherein the sensor element has
- a first contact surface which the first member contacts,
- a second contact surface which the second member contacts, and
- a first hollow portion in which the first contact surface fits is formed on an inner bottom surface of the recessed section.
7 more elements
Dependencies are inferred from the claim text.