Measurement method and measurement program

Abstract

According to an embodiment of the present invention, a method of measuring a shape based on reflected light from a surface of an object irradiated with light from a measurement head, includes: acquiring a first measurement result by setting a measurement condition suitable for the measurement of a first region of the object and by measuring a first scanning range of the surface with a first scanning pitch; determining a second region of the surface except the first region from the first measurement result; and acquiring a second measurement result by setting a measurement condition suitable for the measurement of the second region and by measuring a second scanning range of the surface narrower than the first scanning range with a second scanning pitch finer than the first scanning pitch.

Dependencies are inferred from the claim text.