Vacuum pump and abnormality cause estimating method for vacuum pump

A vacuum pump comprising:

• a stator portion physical quantity detecting means for detecting a physical quantity of a stator portion as a signal;
• a threshold for stator portion physical quantity which is set for the signal for the physical quantity;
• a contact determining means for determining a time point when the signal for the physical quantity exceeds the threshold for stator portion physical quantity to be an estimated time point of contact;
• a rotating body displacement detecting means for detecting displacement of a rotating body as a signal;
• a storing means for storing the signal for the displacement;
• a threshold for rotating body stored displacement which is set for the signal for the displacement obtained before the estimated time point of contact and stored in the storing means;
• and
• an abnormality cause estimating means for estimating a cause of the contact depending on whether or not the signal for the displacement obtained before the estimated time point of contact and stored in the storing means exceeds the threshold for rotating body stored displacement.

An abnormality cause estimating method for a vacuum pump, the method comprising:

• detecting displacement of a rotating body as a signal;
• storing the signal for the displacement in a storing means;
• determining a time point when the signal for the displacement exceeds a threshold for rotating body displacement to be an estimated time point of contact;
• and
• estimating a cause of the contact depending on whether or not the signal for the displacement obtained before the estimated time point of contact and stored in the storing means exceeds a threshold for rotating body stored displacement.

An abnormality cause estimating method for a vacuum pump, the method comprising:

• detecting a physical quantity of a stator portion as a signal;
• storing the signal for the physical quantity in a storing means;
• determining a time point when the signal for the physical quantity exceeds a threshold for stator portion physical quantity to be an estimated time point of contact;
• and
• estimating a cause of the contact depending on whether or not the signal for the physical quantity obtained before the estimated time point of contact and stored in the storing means exceeds a threshold for stator portion stored physical quantity.