Systems and methods for modifying pressure differential in a chemical vapor process
AssigneeGoodrich Corporation
InventorsJames Warren Rudolph, Ying She, Zissis A. Dardas, Thomas P. Filburn, Brian St. Rock, John Linck
Life of this patent
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Abstract
A process for densifying an annular porous structure comprising flowing a reactant gas into an inner diameter (ID) volume and through an ID surface of the annular porous structure, flowing the reactant gas through an outer diameter (OD) surface of the annular porous structure and into an OD volume, flowing the reactant gas from the OD volume through the OD surface of the annular porous structure, and flowing the reactant gas through an ID surface of the annular porous structure and into the ID volume.
Claims25
A process for densifying an annular porous structure comprising:
- flowing a reactant gas into an inner diameter (ID) volume and through an ID surface of the annular porous structure;
- flowing the reactant gas through an outer diameter (OD) surface of the annular porous structure and into an OD volume;
- flowing the reactant gas from the OD volume through the OD surface of the annular porous structure;
- and
- flowing the reactant gas through the ID surface of the annular porous structure and into the ID volume, wherein a pressure differential between the OD volume and the ID volume may be modified during a single processing cycle.
An apparatus for densifying an annular porous structure comprising:
- a furnace;
- a graphite susceptor disposed in the furnace;
- and
- a reversing valve having a first port and a second port, wherein the first port is coupled to a first inlet/outlet in the furnace via a first line, and wherein the second port is coupled to a second inlet/outlet in the furnace via a second line;
- wherein the reversing valve has an energized state and an unenergized state;
- wherein, in the energized state, the first port conveys a reactant gas to the furnace and into an inner diameter (ID) volume;
- wherein, in the energized state, the second port exhausts the reactant gas through at least one of a second opening disposed in the graphite susceptor and a third opening disposed in the graphite susceptor;
- wherein, in the unenergized state, the second port conveys the reactant gas to the furnace and into an outer diameter (OD) volume;
- wherein, in the unenergized state, the first port exhausts reactant gas through a first opening disposed in the graphite susceptor.
An apparatus for densifying an annular porous structure comprising:
- a graphite susceptor supporting the annular porous structure, wherein the annular porous structure defines an inner diameter (ID) volume and an outer diameter volume (OD), wherein the graphite susceptor comprises a lid;
- a first plug disposed in a first opening of the lid, the first opening in fluid communication with the ID volume;
- a second plug disposed in a second opening of the lid, the second opening in fluid communication with the OD volume;
- a third plug disposed in a third opening of the lid, the third opening in fluid communication with the OD volume;
- and
- a control arm configured to remove at least one of the first plug, the second plug, or the third plug.
Dependencies are inferred from the claim text.