Method Of Improving Ion Beam Quality In A Non-Mass-Analyzed Ion Implantation System

A method of coating walls of a plasma chamber in an ion source, comprising:

• storing conditioning gas in a conditioning gas container, said conditioning gas container being separate from the ion source, wherein said conditioning gas comprises diborane and a filler gas, said filler gas comprising a hydride of a Group 4 element or a hydride of a Group 5 element;
• introducing said conditioning gas from said conditioning gas container into said plasma chamber through a gas inlet in communication with said conditioning gas container and said plasma chamber;
• and
• ionizing said conditioning gas so as to form a plasma, wherein ions from said plasma coat said walls of said plasma chamber with boron and said Group 4 or 5 element.

A method of processing a workpiece, comprising:

• performing a conditioning process, said conditioning process comprising:
• storing a conditioning gas in a conditioning gas container, the conditioning gas comprising a hydride containing a desired dopant species and a filler gas, the filler gas comprising a hydride of a Group 4 element or a hydride of a species having an opposite conductivity of said dopant species;
• introducing said conditioning gas into a plasma chamber of an ion source from said conditioning gas container through a gas inlet in communication with said conditioning gas container and said plasma chamber;
• and
• ionizing said conditioning gas in said plasma chamber so as to form a coating on walls of said plasma chamber;
• and
• performing a second process after said conditioning process, said second process comprising:
• introducing a feedgas into said plasma chamber from a feedgas container after said coating is formed, said feedgas container different from said conditioning gas container, said feedgas comprising fluorine and said desired dopant species;
• ionizing said feedgas in said plasma chamber to create ions;
• and
• extracting said ions from said plasma chamber and accelerating said ions toward said workpiece.