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US 2017/0247788 A1Published application
Shadow mask, film forming system using shadow mask and method of manufacturing a display device
AssigneeJapan Display Inc.
InventorTaiki WATANABE
Life of this patent
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Abstract
A shadow mask includes a mask foil and a plurality of openings provided on the mask foil in accordance with a shape of at least one region where films are formed on a film forming object. The mask foil has an annular shape where first end of the mask foil and a second end of the mask foil, which is opposed to the first end of the mask foil, are connected to each other.
Claims8
A shadow mask comprising:
- a mask foil;
- and
- a plurality of openings provided on the mask foil in accordance with a shape of at least one region where films are formed on a film forming object,
- wherein the mask foil has an annular shape where first end of the mask foil and a second end of the mask foil, which is opposed to the first end of the mask foil, are connected to each other.
1 more element
A film forming system comprising:
- a conveying device that conveys a film forming object;
- an annular shadow mask that has openings in accordance with a shape of at least one region where films are formed on the film forming object and rotates at a speed in accordance with a conveying speed of the conveying device;
- and
- a film forming source that injects a film forming material to be deposited toward the film forming object.
1 more element
A method of manufacturing a display device comprising steps of:
- conveying a film forming object including a display panel;
- rotating an annular shadow mask that has openings in accordance with a shape of at least one region where films are formed on the film forming object at a speed in accordance with a conveying speed of the film forming object;
- and
- injecting a film forming material to be deposited toward the film forming object and forming the films on the film forming object.
1 more element
Dependencies are inferred from the claim text.