MEMS Integrated Pressure Sensor and Microphone Devices and Methods of Forming Same

A micro-electromechanical systems (MEMS) device comprising:

• a MEMS substrate having a first opening, a second opening, and a third opening, the MEMS substrate having a first membrane extending over the first opening, a second membrane extending over the second opening and a third membrane extending over the third opening;
• a carrier substrate bonded to MEMS substrate, the carrier substrate having a first cavity and a second cavity, the first cavity exposing the first membrane, the second cavity extending through the carrier substrate and exposing the second membrane;
• and
• a cap substrate bonded to the MEMS substrate, the cap substrate having a third cavity, a fourth cavity and a fifth cavity, the third cavity exposing the first membrane, the fourth cavity extending through the cap substrate and exposing the second membrane, and the fifth cavity exposing the third membrane, wherein a first surface of the first membrane covers a first one of the first cavity and the third cavity to form a first sealed cavity, a second surface of the first membrane is exposed to ambient, wherein opposing sides of the second membrane are exposed to ambient, and wherein the third membrane covers the fifth cavity to form a second sealed cavity.

A micro-electromechanical systems (MEMS) device comprising:

• a MEMS substrate comprising:
• a first layer;
• a first opening extending through the first layer;
• a first membrane on a first side of the first layer;
• and
• a second membrane on a second side of the first layer opposing the first side of the first layer;
• a carrier substrate bonded to a first side of the MEMS substrate, the carrier substrate having a first cavity that extends partially into the carrier substrate, wherein the first membrane covers the first cavity, wherein a first sealed cavity comprises the first cavity covered by the first membrane;
• and
• a cap substrate bonded to a second side the MEMS substrate, the cap substrate having a second cavity that extends through the cap substrate, wherein opposing sides of the second membrane are exposed to ambient through the second cavity.