Integrated mems transducer and circuitry
AssigneeCirrus Logic International Semiconductor Ltd.
InventorTsjerk Hans HOEKSTRA
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Abstract
The application relates to integrated MEMS transducers comprising a MEMS transducer structure formed of a plurality of transducer layers and at least one circuit component formed from a plurality of circuitry (CMOS) layers. The integrated MEMS transducer further comprises a conductive enclosure that is integral to the transducer layers and circuitry layers. The at least one circuit component is inside the conductive enclosure whilst the MEMS transducer structure is outside the enclosure.
Claims20
An integrated MEMS transducer comprising a MEMS transducer structure and at least one circuit component, the integrated MEMS transducer further comprising a conductive enclosure provided such that the at least one circuit component is inside the conductive enclosure, and wherein the MEMS transducer structure is outside the enclosure.
An integrated MEMS transducer comprising a MEMS transducer structure and circuitry provided on a single substrate, wherein the MEMS transducer structure is formed from a plurality of transducer layers and wherein at least one conductive layer deposited during the fabrication of the MEMS transducer structure forms a shield which overlies the circuitry for shielding the circuitry from electromagnetic radiation.
A method of fabricating an integrated MEMS transducer comprising a MEMS transducer structure and at least one circuit component on a substrate, the method comprising:
- forming, on a first region of the substrate, a plurality of CMOS layers, wherein the at least one circuit component is formed from one or more of the CMOS layers;
- forming, on a second region of the substrate, a plurality of transducer layers to form the MEMS transducer structure;
- wherein said method comprises depositing conductive material which forms a conductive layer of the MEMS transducer structure and which also forms a top-plate which overlies the at least one circuit component, said top-plate being for shielding the circuitry from electromagnetic radiation.
Dependencies are inferred from the claim text.