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US 2017/0247246 A1Published application
Mems component
AssigneeRobert Bosch GmbH
InventorsChristoph Schelling, Benedikt Stein, Michael Stumber
Life of this patent
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Abstract
A layer material which is particularly suitable for the realization of self-supporting structural elements having an electrode in the layer structure of a MEMS component. The self-supporting structural element is at least partially made up of a silicon carbonitride (Si1-x-yCxNy)-based layer.
Claims8
1-7. (canceled)
A MEMS component, comprising:
- a layer structure in which at least one self-supporting structural element having at least one electrode is realized, the self-supporting structural element being at least partially made up of a layer based on silicon carbonitride (Si1-x-yCxNy), and at least one further electrode being developed in the layer structure, which forms a capacitor system together with the electrode of the self-supporting structural element, wherein at least one of the two electrodes of the capacitor system is supported so as to allow it to move, wherein the self-supporting structural element is used one of a stationary carrier or stationary connection, for at least one of the electrodes of the capacitor system.
The MEMS component as recited in claim 1, wherein the self-supporting structural element is a bending beam.
Dependencies are inferred from the claim text.