Chemical supply unit capable of automatically replacing a canister and a substrate treatment apparatus having the same
AssigneeSamsung Electronics Co., Ltd.
InventorsSUNGMIN JANG, SU-HWAN KIM, DAI-HEE LEE
Life of this patent
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Abstract
A substrate treatment apparatus includes a substrate treatment unit configured to provide a chemical solution to a substrate to treat the substrate, and a chemical supply unit configured to supply the chemical solution to the substrate treatment unit. The chemical supply unit includes a loader configured to load a canister containing the chemical solution to the chemical supply unit, a clamp configured to clamp the canister in place, a chemical supply line through which the chemical solution is supplied to the substrate treatment unit, and a coupler configured to couple the chemical supply line to the canister.
Claims20
A substrate treatment apparatus, comprising:
- a substrate treatment unit configured to provide a chemical solution to a substrate to treat the substrate;
- and
- a chemical supply unit configured to supply the chemical solution to the substrate treatment unit,
- wherein the chemical supply unit comprises:
- a loader configured to load a canister containing the chemical solution to the chemical supply unit;
- a clamp configured to clamp the canister in place;
- a chemical supply line through which the chemical solution is supplied to the substrate treatment unit;
- and
- a coupler configured to couple the chemical supply line to the canister.
A chemical supply unit, comprising:
- a loader that loads a canister including a chemical solution to the chemical supply unit;
- a clamp that clamps the canister loaded on the loader;
- a chemical supply line that receives the chemical solution from the canister;
- an opener that opens and closes an injection port of the canister;
- and
- a coupler that couples the chemical supply line to the injection port of the canister.
A substrate treatment apparatus, comprising:
- a chemical supply unit;
- a substrate treatment unit;
- and
- a chemical supply line connecting the chemical supply unit with the substrate treatment unit,
- wherein the chemical supply unit is configured to receive a canister, store the canister within a housing of the chemical supply unit, clamp the canister, open the canister and couple a first end of the chemical supply line to the canister,
- wherein the chemical supply unit is configured to provide a chemical substance stored in the canister to the substrate treatment unit through the chemical supply line,
- wherein, within a housing of the substrate treatment unit, the chemical substance is output from a second end of the chemical supply line and contacts a substrate.
Dependencies are inferred from the claim text.