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AssigneeInternational Business Machines Corporation
InventorsJohn M. Cotte M. Cotte Cotte, Nils D. Hoivik, Christopher V. Jahnes
Estimating the term…
A MEMS device comprises an electro mechanical element in a sealed chamber containing a gas comprising a reactive gas selected to react with any contaminants that may be present or formed on the operating surfaces of the device in a manner to maximize the electrical conductivity of the surfaces during operation of the device. The MEMS device may comprise a MEMS switch having electrical contacts as the operating surfaces. The reactive gas may comprise hydrogen or an azane, optionally mixed with an inert gas, or any combination of the gases. The corresponding process provides a means to substantially reduce or eliminate contaminants present or formed on the operating surfaces of MEMS devices in a manner to maximize the electrical conductivity of the surfaces during operation of the devices.
An article of manufacture comprising a MEMS device that comprises a sealed chamber containing an electro mechanical element having operating surfaces, said chamber containing a gas comprising a reactive gas selected to react with any contaminants that may be present or formed on the operating surfaces of said device in said chamber in a manner to maximize the electrical conductivity of said surfaces during operation of said MEMS device.
A process for substantially reducing contaminants in a MEMS device comprising a sealed chamber containing an electro mechanical element having operating surfaces, by placing a gas in said chamber comprising a reactive gas selected to react with any contaminants that may be present or formed on the operating surfaces of said device in said chamber in a manner to maximize the electrical conductivity of said operating surfaces during operation of said MEMS device.
Dependencies are inferred from the claim text.