Covering material stripping method and stripping device using ion irradiation
AssigneeShinmaywa Industries, Ltd.
InventorsKensuke UEMURA, G. Alexey REMNEV
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Abstract
A de-coating method includes: exposing a coated body in which a coating made of an inorganic material is formed on a surface of the metal body to ion flows to peel off the coating from the metal body, wherein the coated body is placed at an ion flow-concentrated portion where two or more ion flows overlap each other, and is exposed to the ion flows without addition of a positive or negative bias to the coated body. As gases for use in generating ions from plasma, oxygen and CF4 that promote de-coating through a chemical reaction are preferably used in addition to Ar that performs de-coating under the physical action of ion collision and stabilizes plasma.
Claims5
1-7. (canceled)
A de-coating method comprising:
- placing a coated body in which a coating made of an inorganic material is formed on a surface of a metal body at an ion flow-concentrated portion where two or more ion flows overlap each other;
- grounding the coated body;
- and exposing the coated body to the ion flows to peel off the coating from the metal body,
- the de-coating method comprising:
- a first step which includes turning a gas [1] containing at least 67 vol % of oxygen into plasma to generate ions of the gas and exposing the coated body to the resulting ion flows to perform de-coating, and
- a second step which includes turning a gas [2] containing at least 80 vol % of argon into plasma to generate ions of the gas and exposing the coated body to the resulting ion flows to perform de-coating,
- wherein the first step is followed by the second step.
Dependencies are inferred from the claim text.