Dry pump and exhaust gas treatment method
AssigneeEdwards Japan Limited
InventorsKatsumi Nishimura, Katsunori Takahashi
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Abstract
An object of the present invention is to provide a dry pump and an exhaust gas treatment method which can improve an effect of inhibiting a reaction product from adhering to the inside of a gas outlet port of the dry pump, a gas exhaust pipe, or the like and can also improve an energy saving effect. To attain the object, the present invention includes the gas exhaust pipe disposed to be connected to the gas outlet port of the dry pump and to a gas inlet port of a detoxification device, and a heat exchanger which heats a diluent gas introduced therein using a heat generated from the dry pump and introduces the heated diluent gas into the gas exhaust pipe to heat a used gas to a temperature of not less than a predetermined value.
Claims14
A dry pump which sucks in a gas exhausted from a process chamber,
- wherein
- a diluent gas heated using a heat generated from the dry pump is introduced into either a gas outlet port of the dry pump or a gas exhaust pipe connected to the gas outlet port.
An exhaust gas treatment method, comprising the step of:
- introducing, in a dry pump which sucks in a gas exhausted from a process chamber, a diluent gas heated using a heat generated from the dry pump into the gas from the process chamber to dilute the gas from the process chamber.
Dependencies are inferred from the claim text.