Back to results
US 2017/0203511 A1Published application
Additively manufactured gas distribution manifold
AssigneeLam Research Corporation
InventorsChristopher William Burkhart, Andrew C. Lee, David J. Hemker
Life of this patent
Estimating the term…
Abstract
Methods and apparatuses for additively manufactured tubular passages, additively manufactured manifolds, and additively manufactured heaters are provided.
Claims20
An apparatus comprising:
- a manifold constructed by additive manufacturing and including a plurality of tubular passages, wherein:
- at least one tubular passage follows a pathway and has an exterior surface that includes a first runway,
- the first runway includes a surface defined by a first profile that is swept along the pathway,
- the first profile is in a plane perpendicular to the pathway, and
- the first profile is substantially linear.
2 more elements
A method for creating a heater on a tubular passage using additive manufacturing, the method comprising:
- providing the tubular passage;
- depositing a first flowable dielectric onto the tubular passage using a computer controlled first nozzle;
- curing the first flowable dielectric;
- depositing a resistive heating element onto the cured first flowable dielectric using a computer controlled second nozzle;
- curing the resistive heating element;
- depositing a second flowable dielectric onto the resistive heat trace using a computer controlled third nozzle, wherein the resistive heating element is interposed between the first cured flowable dielectric and the second flowable dielectric;
- and
- curing the second flowable dielectric.
5 more elements
A method for creating a heater on a tubular passage using screen printing, the method comprising:
- providing an additively manufactured tubular passage, wherein:
- the tubular passage follows a two-dimensional pathway and has an exterior surface that includes a runway,
- the runway includes a surface defined by a first profile that is swept along the pathway,
- the first profile is in a plane perpendicular to the pathway, and
- the first profile is substantially linear;
- screen-printing a first dielectric layer onto the runway;
- curing the first dielectric layer;
- screen-printing a resistive heating element onto the first dielectric layer;
- curing the resistive heat trace;
- screen-printing a second dielectric layer onto the resistive heating element, wherein the resistive heating element is interposed between the first dielectric layer and the second dielectric layer;
- and
- curing the second dielectric layer.
9 more elements
Dependencies are inferred from the claim text.