Imprint template and method for producing the same
AssigneesToyama Prefecture, Kyoritsu Chemical & Co., Ltd., Zeon Corporation
InventorsTsutomu OBATA, Yoshiyuki YOKOYAMA, Masaaki NASUNO, Mikiharu KUCHIKI, Tomoshi AONO, Motofumi KASHIWAGI
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Abstract
An imprint template is used for photocuring imprinting, and includes a support plate that is transparent with respect to an exposure wavelength used for photocuring imprinting, and has flexibility; a buffer resin layer that is formed on the support plate, and is formed of an elastic material that is transparent with respect to the exposure wavelength; and a resin film mold that is removably bonded to the buffer resin layer, and is transparent with respect to the exposure wavelength, wherein a concave-convex transfer pattern is formed on a surface of the resin film mold.
Claims6
An imprint template comprising:
- a support plate that is transparent with respect to an exposure wavelength used for photocuring imprinting, and has flexibility;
- a buffer resin layer that is formed on the support plate, and is transparent with respect to the exposure wavelength;
- and
- a resin film mold that is removably bonded to the buffer resin layer, and is transparent with respect to the exposure wavelength,
- wherein a concave-convex transfer pattern is formed on a surface of the resin film mold.
A method for producing an imprint template comprising:
- forming a buffer resin layer on a surface of a support plate, the support plate being transparent with respect to an exposure wavelength used for photocuring imprinting, and having flexibility, and the buffer resin layer being formed of an elastic material that is transparent with respect to the exposure wavelength;
- and
- subjecting a back surface of a resin film mold that is transparent with respect to the exposure wavelength to a plasma treatment, and bonding the back surface of the resin film mold to a surface of the buffer resin layer, a concave-convex transfer pattern being formed on a front surface of the resin film mold.
Dependencies are inferred from the claim text.