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US 2017/0197865 A1Published application
Mold, method for producing a mold, and method for forming a mold article
AssigneeInfineon Technologies Austria AG
InventorsGuenter Denifl, Alexander Breymesser, Markus Kahn, Andre Brockmeier
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Abstract
Various embodiments provide a mold including a pyrolytic carbon film disposed at a surface of the mold. Various embodiments relate to using a low pressure chemical vapor deposition process (LPCVD) or using a physical vapor deposition (PVD) process in order to form a pyrolytic carbon film at a surface of a mold.
Claims20
A method for producing a mold, the method comprising:
- providing a patterned substrate;
- and
- depositing a pyrolytic carbon film on the patterned substrate.
A method for forming a mold article, the method comprising:
- providing a mold having at least one opening and having a pyrolytic carbon film formed at least over one or more walls of the at least one opening;
- filling the at least one opening with a molding material;
- and
- removing the molding material from the mold.
1 more element
Dependencies are inferred from the claim text.