Electrode Tip for ARC Lamp
AssigneeMattson Technology, Inc.
InventorsMarkus Lieberer, Christian Seifert, Rolf Bremensdorfer
Life of this patent
Estimating the term…
Abstract
Electrode tips for arc lamps for use in, for instance, a millisecond anneal system are provided. In one example implementation, an electrode for an arc lamp can have an electrode tip. The surface of the electrode tip can have one or more grooves to reduce the transportation of molten material across the surface of the electrode tip. The electrode can include an interface between the electrode tip and a heat sink. The interface can have a shape designed to have a desired lateral temperature distribution across the surface of the electrode tip.
Claims20
A millisecond anneal system, comprising:
- a processing chamber for thermally treating a semiconductor substrate using a millisecond anneal process;
- one or more arc lamp heat sources, each of the one or more arc lamp heat sources comprising a plurality of electrodes for generating an arc through a gas in the arc lamp to generate a plasma;
- wherein at least one of the plurality of electrodes has an electrode tip having a surface with at least one groove to reduce lateral transportation of molten material across the surface of the electrode tip.
An arc lamp, comprising:
- a plurality of electrodes;
- and
- one or more inlets configured to receive water to be circulated through the arc lamp during operation, the one or one or more inlets configured to receive a gas, wherein during operation of the arc lamp, the gas is converted into a plasma during an arc discharge between the plurality of electrodes;
- wherein at least one of the plurality of electrodes has an electrode tip, the electrode tip having a surface with at least one groove to reduce lateral transportation of molten material across the surface of the electrode tip.
An arc lamp, comprising:
- a plurality of electrodes;
- and
- one or more inlets configured to receive water to be circulated through the arc lamp during operation, the one or one or more inlets configured to receive a gas, wherein during operation of the arc lamp, the gas is converted into a plasma during an arc discharge between the plurality of electrodes;
- wherein at least one of the plurality of electrodes has an electrode tip and a heat sink, wherein the electrode has an interface between the electrode tip and the heat sink, the interface being concave or convex.
Dependencies are inferred from the claim text.