Method and station for treatment of a transport container made of plastic material for the atmospheric storage and conveyance of substrates
AssigneePfeiffer Vacuum GmbH
InventorsJulien PALISSON, Catherine LE GUET
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Abstract
A method for treatment of a plastic transport box for conveyance and atmospheric storage of substrates including walls bounding a volume intended for storage of substrates, and a station for treatment of transport boxes for conveyance and atmospheric storage of substrates, the method including: at least one plasma treatment in which at least one interior wall of the transport box is subjected to a plasma of a treatment gas at a gas pressure lower than 10000 pascals.
Claims13
1-12. (canceled)
A method for treatment of a plastic transport box for conveyance and atmospheric storage of substrates including walls bounding a volume intended for storage of substrates, the method comprising:
- at least one plasma treatment in which at least one interior wall of the transport box is subjected to a plasma of a treatment gas at a gas pressure lower than 10000 pascals.
Dependencies are inferred from the claim text.