# US 2017/0178859 A1 · Systems for controlling a high power ion beam

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- Number: US 2017/0178859 A1
- Document ID: US20170178859A1
- Status: Published application
- Kind: A1
- Application number: 15/325,594
- Filed: 2015-07-08
- Published: 2017-06-22
- Earliest claimed: 2014-07-11
- Assignees: Neutron Therapeutics, Inc.
- Applicants: Neutron Therapeutics Inc.
- Inventors: Geoffrey Ryding; Takao Sakase; Theodore Smick
- Web page: https://patentgrep.com/patent/US20170178859A1

## CPC

- H01J 37/3045: {Object or beam position registration}
- C30B 29/20: Aluminium oxides
- C30B 31/22: by ion-implantation
- H01J 37/244: Detectors; Associated components or circuits therefor
- H01J 37/3171: {for ion implantation}
- H01J 2237/0835: Variable cross-section or shape
- H01J 2237/24405: Faraday cages
- H01J 2237/24507: Intensity, dose or other characteristics of particle beams or electromagnetic radiation
- H01J 2237/3109: Cutting
- H01J 2237/3142: Ion plating
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- C30B: SINGLE-CRYSTAL GROWTH (by using ultra-high pressure, e.g. for the formation of diamonds, B01J3/06); UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL (zone-refining of metals or alloys C22B); PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (casting of metals, casting of other substances by the same processes or devices B22D; working of plastics B29; modifying the physical structure of metals or alloys C21D, C22F); SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (for producing semiconductor devices or parts thereof H10); APPARATUS THEREFOR

## Abstract

A system for controlling a high-power ion beam is disclosed, such as for steering, measuring, and/or dissipating the beam's power. In one embodiment, the ion beam can be controlled by being imparted into a cylindrical tube (e.g., a faraday cup), and deflected to strike an interior tube wall at an angle, thereby increasing an impact area of the beam on the wall. By also rotating the deflected beam around a circumference of the interior wall, the impact area of the ion beam may be further increased, thereby absorbing (dissipating) the high-power ion beam on the wall. In another embodiment, the ion beam may be passed through first, second, and third adjustable magnetic rings. By adjusting a relative angle between the rings and a combined rotation angle of all of the rings, a deflected ion beam may be rotated around a circumference of the interior wall of a power-absorbing tube, accordingly.

## Claims

### Claim 1

A method for controlling an ion beam, the method comprising:
imparting an ion beam from an ion beam source into an end of a cylindrical tube, the ion beam having an original cross sectional area;
deflecting the ion beam to strike an interior wall of the tube at an angle, thereby creating an impact area of the ion beam on the interior wall that is greater than the original cross sectional area; and
rotating the deflected ion beam around a circumference of the interior wall of the tube, thereby increasing the impact area of the ion beam on the interior wall;
wherein a beam power of the ion beam is absorbed by the increased impact area on the interior wall.

### Claim 2 (depends on 1)

The method as in claim 1, wherein the tube is a faraday cup, the method further comprising:
measuring an ion beam intensity from the beam power striking the interior wall.

### Claim 3 (depends on 2)

The method as in claim 2, wherein the interior wall is segmented into a plurality of sections, the method further comprising:
independently measuring ion beam intensities of the beam power striking a respective section of the plurality of sections.

### Claim 4 (depends on 3)

The method as in claim 3, further comprising:
determining information regarding one or more of a size, shape, and direction of the ion beam based on the independently measured ion beam intensities.

### Claim 5 (depends on 3)

The method as in claim 3, further comprising:
scanning the deflected ion beam across the plurality of sections; and
measuring ion beam information based on the deflected ion beam being scanned over at least a particular one of the plurality of sections over time.

### Claim 6

(canceled)

### Claim 7 (depends on 2)

The method as in claim 2, further comprising:
adjusting the ion beam based at least on the measured ion beam intensity.

### Claim 8

(canceled)

### Claim 9 (depends on 1)

The method as in claim 1, wherein the tube has an egress at an end opposite the ion beam source, the method further comprising:
directing the ion beam out of the tube to strike a target with the ion beam.

### Claim 10

(canceled)

### Claim 11

(canceled)

### Claim 12 (depends on 1)

The method as in claim 1, wherein deflecting the ion beam and rotating the deflected ion beam are performed using a multi-directional beam scanning system comprising:
using a first, second, and third adjustable ring defining an aperture configured to allow passage of the ion beam, each ring configured with magnets to produce a magnetic field vector, the first ring nearest an entrance of the ion beam passage, the third ring nearest an exit of the ion beam passage, and the second ring between the first and third rings;
adjusting a relative angle between the first, second, and third ring to control a magnitude of ion beam deflection from the exit; and
adjusting a combined rotation angle of all of the first, second, and third rings to control azimuthal direction of the ion beam deflection.

### Claim 13 (depends on 1)

The method as in claim 1, wherein deflecting the ion beam and rotating the deflected ion beam are performed using a multi-directional beam scanning system located outside of an evacuated beam chamber through which the ion beam travels.

### Claim 14 (depends on 1)

The method as in claim 1, wherein deflecting the ion beam is performed using an electromagnet system.

### Claim 15 (depends on 1)

The method as in claim 1, wherein rotating the deflected ion beam is performed using a stationary electromagnet system.

### Claim 16

(canceled)

### Claim 17

(canceled)

### Claim 18

(canceled)

### Claim 19

(canceled)

### Claim 20

A system for controlling an ion beam, the system comprising:
a cylindrical tube;
an ion beam source configured to impart an ion beam into an end of the cylindrical tube, the ion beam having an original cross sectional area; and
an ion beam controller configured to:
deflect the ion beam to strike an interior wall of the tube at an angle, thereby creating an impact area of the ion beam on the interior wall that is greater than the original cross sectional area; and
rotate the deflected ion beam around a circumference of the interior wall of the tube, thereby increasing the impact area of the ion beam on the interior wall, wherein a beam power of the ion beam is absorbed by the increased impact area on the interior wall.

### Claim 21 (depends on 20)

The system as in claim 20, wherein the tube is a faraday cup, the system further comprising:
a faraday cup analyzer configured to measure an ion beam intensity from the beam power striking the interior wall.

### Claim 22 (depends on 21)

The system as in claim 21, wherein the interior wall is segmented into a plurality of sections, the faraday cup analyzer further configured to independently measure ion beam intensities of the beam power striking a respective section of the plurality of sections.

### Claim 23 (depends on 22)

The system as in claim 22, wherein the faraday cup analyzer is further configured to determine information regarding one or more of a size, shape, and direction of the ion beam based on the independently measured ion beam intensities.

### Claim 24 (depends on 21)

The system as in claim 21, wherein the ion beam controller is further configured to scan the deflected ion beam across the plurality of sections, and wherein the faraday cup analyzer is further configured to measure ion beam information based on the deflected ion beam being scanned over at least a particular one of the plurality of sections over time.

### Claim 25

(canceled)

### Claim 26

(canceled)

### Claim 27

(canceled)

### Claim 28 (depends on 20)

The system as in claim 20, wherein the tube has an egress at an end opposite the ion beam source, the ion beam controller further configured to direct the ion beam out of the tube to strike a target with the original cross section of the ion beam.

### Claim 29

(canceled)

### Claim 30 (depends on 20)

The system as in claim 20, wherein the ion beam controller comprises a multi-directional beam scanning system.

### Claim 31 (depends on 30)

The system as in claim 30, wherein the multi-directional beam scanning system comprises:
a first, second, and third adjustable ring defining an aperture configured to allow passage of the ion beam, each ring configured with magnets to produce a magnetic field vector, the first ring nearest an entrance of the ion beam passage, the third ring nearest an exit of the ion beam passage, and the second ring between the first and third rings;
wherein adjusting a relative angle between the first, second, and third ring controls a magnitude of ion beam deflection from the exit; and
wherein adjusting a combined rotation angle of all of the first, second, and third rings controls azimuthal direction of the ion beam deflection.

### Claim 32 (depends on 30)

The system as in claim 30, wherein the multi-directional beam scanning system is located outside of an evacuated beam chamber through which the ion beam travels.

### Claim 33 (depends on 20)

The system as in claim 20, wherein the ion beam controller comprises an electromagnet system.

### Claim 34 (depends on 33)

The system as in claim 33, wherein the electromagnet system comprises a stationary electromagnet system configured to rotate the deflected ion beam.

### Claim at position 35

35-68. (canceled)