Targeted control of the absorption behavior during laser resealing
AssigneeRobert Bosch GmbH
InventorsMawuli AMETOWOBLA, Philip KAPPE
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AssigneeRobert Bosch GmbH
InventorsMawuli AMETOWOBLA, Philip KAPPE
Estimating the term…
A method for manufacturing a micromechanical component including a substrate and a cap, which is connected to the substrate and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity, includes in a first task, an access opening connecting the first cavity to surroundings of the component is formed in the substrate or cap, in a second task, the first pressure and/or the first chemical composition is adjusted in the first cavity, in a third task, the access opening is sealed by introducing energy or heat into an absorbing part of the substrate or cap with a laser, the introduction of the energy or heat occurring by adjusting the extension of the absorbing part and adjusting the absorption strength in the absorbing part to minimize stresses occurring in the substrate or cap.
A method for manufacturing a micromechanical component, which includes a substrate and a cap, which is connected to the substrate and which, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity, the method comprising:
A micromechanical component, comprising:
Dependencies are inferred from the claim text.