Laser reseal including a protective structure
AssigneeRobert Bosch GmbH
InventorsAchim Breitling, Frank Reichenbach, Jochen Reinmuth, Julia Amthor
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AssigneeRobert Bosch GmbH
InventorsAchim Breitling, Frank Reichenbach, Jochen Reinmuth, Julia Amthor
Estimating the term…
A method for manufacturing a micromechanical component including a substrate and a cap connected to the substrate, the cap, together with the substrate, enclosing a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity. An access opening connecting the first cavity to surroundings of the micromechanical component is formed in the substrate or in the cap. The first pressure and/or the first chemical composition is adjusted in the first cavity. The access opening is sealed by introducing energy or heat into an absorbing part of the substrate or of the cap with the aid of a laser. A layer for protecting the sealed access opening is applied to or deposited on or grown on a material area, which transitions into a liquid aggregate state and then transitions into a solid aggregate state and seals the access opening.
A method for manufacturing a micromechanical component including a substrate and a cap connected to the substrate, the cap, together with the substrate, enclosing a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity, the method comprising:
A micromechanical component, comprising:
Dependencies are inferred from the claim text.