Method of fabricating a nanochannel system for dna sequencing and nanoparticle characterization
AssigneeBoard of Trustees of the University of Arkansas
InventorsChao-Hung Steve Tung, Jin-Woo Kim, Taylor Busch
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AssigneeBoard of Trustees of the University of Arkansas
InventorsChao-Hung Steve Tung, Jin-Woo Kim, Taylor Busch
Estimating the term…
A process for fabricating a nanochannel system using a combination of microelectromechanical system (MEMS) microfabrication techniques, atomic force microscopy (AFM) nanolithography, and focused ion beam (FIB). The nanochannel system, fabricated on either a glass or silicon substrate, has channel heights and widths on the order of single to tens of nanometers. The channel length is in the micrometer range. The nanochannel system is equipped with embedded micro and nanoscale electrodes, positioned along the length of the nanochannel for electron tunneling based characterization of nanoscale particles in the channel. Anodic bonding is used to cap off the nanochannel with a cover chip.
A method of fabricating a nanochannel system comprising the steps of:
A nanochannel system for DNA sequencing comprising:
A method of DNA sequencing using a nanochannel system that comprises a substrate comprising at least one pair of electrodes dissected by a nanochannel having a first end and a second end, wherein an inlet reservoir is joined to said first end of said nanochannel and an outlet reservoir is joined to said second end of said nanochannel, the method comprising the steps of:
A method of fabricating a nanochannel system comprising the steps of:
Dependencies are inferred from the claim text.