On-board metrology (obm) design and implication in process tool

An apparatus, comprising:

• a factory interface;
• a first storage pod coupled to a first side of the factory interface through a first load port, and the first storage pod comprises one or more substrate carriers;
• a metrology housing removably coupled to the first side of the factory interface through a second load port, the metrology housing comprises an on-board metrology assembly for measuring film properties of a substrate to be transferred into the metrology housing;
• and
• a load lock chamber coupled to a second side of the factory interface and operating at vacuum environment, wherein the factory interface has a robot configured to provide access to the metrology housing and the load lock chamber.

A processing tool, comprising:

• a transfer chamber having a robotic arm;
• a factory interface having an atmospheric robot;
• a batch curing chamber coupled to the factory interface;
• a load lock chamber having a first side coupling to the transfer chamber and a second side coupling to a first side of the factory interface, the load lock chamber is configured to receive one or more substrates from the atmospheric robot;
• a flowable CVD deposition chamber coupled to the transfer chamber;
• a first storage pod coupled to a second side of the factory interface through a first load port, and the first storage pod comprises one or more substrate carriers;
• and
• an metrology housing coupled to the second side of the factory interface through a second load port, the metrology housing comprises an on-board metrology assembly for measuring film properties of a substrate to be transferred into the metrology housing by the atmospheric robot.