Thermal chemical vapor deposition split-functionalization process, product, and coating
AssigneeSilcotek Corp.
InventorsMin YUAN, Paul H. SILVIS, David A. SMITH, James B. MATTZELA
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AssigneeSilcotek Corp.
InventorsMin YUAN, Paul H. SILVIS, David A. SMITH, James B. MATTZELA
Estimating the term…
Thermal chemical vapor deposition split-functionalizing processes, coatings, and products are disclosed. The thermal chemical vapor deposition split-functionalizing process includes positioning an article within an enclosed chamber, functionalizing the article within a first temperature range for a first period of time, and then further functionalizing the article within a second temperature range for a second period of time. The thermal chemical vapor deposition split-functionalized product includes a functionalization formed by functionalizing within a first temperature range for a first period of time and a further functionalization formed by further functionalizing within a second temperature range for a second period of time.
A thermal chemical vapor deposition split-functionalizing process, comprising:
A thermal chemical vapor deposition split-functionalizing process, comprising:
A thermal chemical vapor deposition split-functionalized product, comprising:
Dependencies are inferred from the claim text.