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US 2017/0122997 A1Published application
Semiconductor device and method of inspecting a semiconductor device
AssigneeSii Semiconductor Corporation
InventorKaoru SAKAGUCHI
Life of this patent
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Abstract
Provided is a semiconductor device including a MOS analog circuit which has a high reliability and a low manufacturing cost, and in which latent failure is easily detected. The MOS analog circuit is switched to a test state or an operating state based on a control signal that is externally supplied. In the test state, a voltage between a power supply terminal and a reference terminal is applied to a gate oxide film of a MOS transistor included in the MOS analog circuit.
Claims3
A semiconductor device, comprising:
- a MOS analog circuit comprising a MOS transistor;
- and
- a power supply terminal and a reference terminal for supplying a voltage to the MOS analog circuit,
- wherein the MOS analog circuit is configured to switch to one of a test state and an operating state based on a control signal that is externally supplied, and
- wherein, in the test state, a current path formed, when the MOS transistor is turned on, between the power supply terminal and the reference terminal is blocked, and a voltage between the power supply terminal and the reference terminal is applied to a gate oxide film of the MOS transistor.
2 more elements
A method of inspecting a semiconductor device,
- the semiconductor device comprising:
- a MOS analog circuit comprising a MOS transistor;
- and
- a power supply terminal and a reference terminal for supplying a voltage to the MOS analog circuit,
- the method comprising:
- switching, based on a control signal that is externally supplied, the MOS analog circuit to a test state in which a current path formed, when the MOS transistor is turned on, between the power supply terminal and the reference terminal is blocked, and a voltage between the power supply terminal and the reference terminal is applied to a gate oxide film of the MOS transistor;
- measuring a current flowing between the power supply terminal and the reference terminal;
- and
- detecting failure of the semiconductor device.
6 more elements
Dependencies are inferred from the claim text.