Back to results
US 2017/0115116 A1Published application
Physical Quantity Sensor, Electronic Apparatus, and Moving Object
AssigneeSeiko Epson Corporation
InventorTsugio Ide
Life of this patent
Estimating the term…
Abstract
A physical quantity sensor includes: a base; an IC disposed on the base; an angular rate sensor and an acceleration sensor disposed on the IC; a first stress buffer layer disposed between the IC and the angular rate sensor; and a second stress buffer layer disposed between the IC and the acceleration sensor. The first and second stress buffer layers are disposed spaced apart from each other.
Claims20
A physical quantity sensor comprising:
- a base;
- a circuit element disposed on the base;
- a first physical quantity sensor element disposed over at least one of the base and the circuit element, and driven to vibrate;
- a second physical quantity sensor element disposed over at least one of the base and the circuit element;
- and
- a stress buffer layer interpose between at least one of the first physical quantity sensor element and the second physical quantity sensor element and at least one of the base and the circuit element.
3 more elements
Dependencies are inferred from the claim text.