Method for producing chlorosilane gas using continuous tubular reactor
AssigneeLG Chem, Ltd.
InventorsYoo Seok KIM, Jeong Kyu KIM, JinHyoung YOO, JungWoo LEE, Eunsu JANG
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Abstract
The present invention relates to an apparatus for producing trichlorosilane from tetrachlorosilane in an efficient manner. The apparatus includes an inlet through which reaction raw materials including a metal silicon powder dispersed in liquid tetrachlorosilane enter, a hole through which a gaseous reaction raw material is fed, an outlet through which reaction products including trichlorosilane exit, a tubular reactor in which the reaction raw materials entering through the inlet react with each other during flow, and means for impeding the flow of the fluids to cause collision of the fluids during flow.
Claims11
An apparatus for producing trichlorosilane, comprising an inlet through which reaction raw materials comprising a metal silicon powder dispersed in liquid tetrachlorosilane enter, a hole through which a gaseous reaction raw material is fed, an outlet through which reaction products comprising trichlorosilane exit, a tubular reactor in which the reaction raw materials entering through the inlet react with each other during flow, and means for impeding the flow of the fluids to cause collision of the fluids during flow.
Dependencies are inferred from the claim text.