Method of fabricating a color filter array using a multilevel structure
AssigneeApplied Materials, Inc.
InventorsCarl P. TAUSSIG, Edward Robert HOLLAND, Ping MEI, Richard E. ELDER
Life of this patent
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Abstract
A method of fabricating a color filter array including providing substrate, forming a multilevel structure that is attached to the substrate, etching the multilevel structure to expose first wells in the multilevel structure, filling at least the first wells in the multilevel structure with the first color component, curing the first color component, etching the multilevel structure to expose second wells in the multilevel structure, filling at least the second wells in the multilevel structure with a second color component, and curing the second color component.
Claims20
A color filter array comprising:
- a structure having a top side and a bottom side and including ribs that define first wells and second wells in the structure, wherein a top side of each rib is planar;
- a first color component in the first wells and substantially planar with the top side of the structure;
- a second color component in the second wells and substantially planar with the top side of the structure;
- and
- a blocking layer.
A color filter array comprising:
- a structure having a top side and a bottom side and including ribs that define first wells and second wells in the structure, wherein a top side of each rib is planar;
- a first color component in the first wells and substantially planar with the top side of the structure;
- a second color component in the second wells and substantially planar with the top side of the structure;
- and
- a substrate structure including a first conductive layer and a second conductive layer.
A color filter array comprising:
- a structure having a top side and a bottom side and including ribs that define first wells and second wells in the structure, wherein a top side of each rib is planar;
- a first color component in the first wells and substantially planar with the top side of the structure;
- a second color component in the second wells and substantially planar with the top side of the structure;
- and
- an opaque layer that provides black lines between the first color component and the second color component.
Dependencies are inferred from the claim text.