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US 2017/0098525 A1Published application
Method and apparatus for an electromagnetic emission based imaging system
AssigneeFrederick A. Flitsch
InventorFrederick A. Flitsch
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Abstract
The present invention provides apparatus for an imaging system comprising a multitude of imaging elements upon a substrate. In some embodiments the substrate may be approximately round with a radius of approximately one inch. Various methods relating to using and producing an imaging system are discussed.
Claims16
An imaging apparatus comprising:
- a first apparatus comprising a first substrate with a multitude of imaging elements arrayed thereupon, wherein the imaging elements are capable of emitting an imaging signal from their structure to a material sensitive to their emissions on a surface in a vicinity of the first apparatus, wherein the imaging elements are nano-scaled photon emitters metal deposited upon the first substrate, and wherein there are more than 1000 emitters of the first apparatus;
- a support component for a second substrate to be processed by the imaging apparatus;
- an alignment feature and alignment apparatus to measure the alignment feature;
- and
- a processor operant to collect data from imaging apparatus components, process the data and control imaging apparatus components based on the data.
2 more elements
A method of forming an imaging system comprising:
- forming two or more individual imaging system elements, the method of forming the elements comprising:
- depositing a layer of metal on a first substrate;
- etching a plurality of photon emitters into a layer of metal;
- finishing processing of an integrated circuit with metal layers;
- and
- connecting a metal layer of an integrated circuit to a photon emitter to form a first imaging system element;
- testing two or more of the individual imaging system elements;
- emitting photons onto a second substrate comprising a photon sensitive layer;
- and measuring characteristics of exposed portions of the photon sensitive layer.
6 more elements
An imaging apparatus comprising:
- an array of photon emitters, wherein the photon emitters comprise metallic structures on a base layer, wherein the photon emitters are shaped by an etching process, and wherein the photon emitters are tuned to emit at wavelengths that are a fraction of a dimension of the photon emitter and wherein there are more than 10,000 photon emitters in the array;
- and
- electrical circuits connected to each of the photon emitters, wherein the electrical circuits bias the emitters based on data related to an image.
Dependencies are inferred from the claim text.