3d multipath inductor
AssigneeGlobalfoundries Inc.
InventorsRobert A. Groves, Sarath L. K. Parambil, Venkata N. R. Vanukuru
Life of this patent
Estimating the term…
Loading patent…
AssigneeGlobalfoundries Inc.
InventorsRobert A. Groves, Sarath L. K. Parambil, Venkata N. R. Vanukuru
Estimating the term…
A three-dimensional multipath inductor includes turns disposed about a center region on two layers, the turns on the two layers having corresponding geometry therebetween. Each of the turns is comprised of two or more segments that extend length-wise along the turns, and the segments have positions that vary from an innermost position relative to the center region and an outermost position relative to the center region. A lateral cross-over is configured to couple the segments of at least one turn on one layer with the segments on a turn on a same layer to form segment paths that have a substantially same length for all segment paths in a grouping of segment paths on that same layer. A vertical cross-over is configured to couple the segments on different vertically stacked metal layers to have the segment groups with a substantially same length for all segment paths based on vertical lengths.
A method for fabricating a three-dimensional multipath inductor, comprising:
Dependencies are inferred from the claim text.