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AssigneesOsaka University, Itochu Plastics Inc.
InventorsYusuke MORI, Masashi YOSHIMURA, Mamoru IMADE, Masashi ISEMURA, Akira USUI, Masatomo SHIBATA, Takehiro YOSHIDA
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A large Group III nitride crystal of high quality with few defects such as a distortion, a dislocation, and warping is produced by vapor phase epitaxy. A method for producing a Group III nitride crystal includes: a first Group III nitride crystal production process of producing a first Group III nitride crystal 1003 by liquid phase epitaxy; and a second Group III nitride crystal production process of producing a second Group III nitride crystal 1004 on the first crystal 1003 by vapor phase epitaxy. In the first Group III nitride crystal production process, the surfaces of seed crystals 1003a (preliminarily provided Group III nitride) are brought into contact with an alkali metal melt, a Group III element and nitrogen are cause to react with each other in a nitrogen-containing atmosphere in the alkali metal melt, and the Group III nitride crystals are bound together by growth of the Group III nitride crystals grown from the seed crystals 1003a to produce a first crystal 1003.
A method for producing a Group III nitride crystal, comprising:
Dependencies are inferred from the claim text.