Fluid Deposition Apparatus and Method
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChun-Wen Cheng, Jung-Huei Peng, Yi-Shao Liu, Fei-Lung Lai, Shang-Ying Tsai
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Abstract
The present disclosure relates to a method of depositing a fluid onto a substrate. In some embodiments, the method may be performed by mounting a substrate to a micro-fluidic probe card, so that the substrate abuts a cavity within the micro-fluidic probe card that is in communication with a fluid inlet and a fluid outlet. A first fluidic chemical is selectively introduced into the cavity via the fluid inlet of the micro-fluidic probe card.
Claims20
A method of depositing a fluid onto a substrate, comprising:
- mounting a substrate to a micro-fluidic probe card, so that the substrate abuts a cavity within the micro-fluidic probe card that is in communication with a fluid inlet and a fluid outlet;
- and
- selectively introducing a first fluidic chemical to the cavity via the fluid inlet of the micro-fluidic probe card.
A method of depositing a fluid onto a substrate, comprising:
- forming one or more semiconductor devices along a surface of a substrate;
- bringing the surface of the substrate into contact with a cavity within a micro-fluidic probe card, wherein the micro-fluidic probe card comprises a fluid inlet and a fluid outlet in communication with the cavity;
- selectively introducing a fluid to the cavity via the fluid inlet of the micro-fluidic probe card;
- and
- dismounting the micro-fluidic probe card from the substrate.
A method of depositing a fluid onto a substrate, comprising:
- aligning an area of a substrate having one or more devices with a cavity within a micro-fluidic probe card, wherein the cavity is in communication with a fluid inlet and a fluid outlet;
- bringing the substrate into contact with the micro-fluidic probe card along an interface comprising a polymer sealant, wherein the polymer sealant hermetically seals the cavity between the micro-fluidic probe card and the substrate;
- introducing a fluid to the cavity via the fluid inlet;
- removing the fluid from the cavity via the fluid outlet;
- and
- dismounting the micro-fluidic probe card from the substrate after removing the fluid from the cavity.
Dependencies are inferred from the claim text.