Terahertz-wave generating element terahertz-wave detecting element and terahertz time-domain spectroscopy device
AssigneeCanon Kabushiki Kaisha
InventorToshihiko Ouchi
Life of this patent
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Abstract
A terahertz-wave generating element includes a waveguide including an electro-optic crystal; an optical coupling member that extracts a terahertz wave, which is generated from the electro-optic crystal as a result of light propagating through the waveguide, to a space; and at least two electrodes that cause a first-order electro-optic effect in the electro-optic crystal by applying an electric field to the waveguide so as to change a propagation state of the light propagating through the waveguide. A crystal axis of the electro-optic crystal of the waveguide is set such that the terahertz wave generated by a second-order nonlinear optical process and the light propagating through the waveguide are phase-matched.
Claims15
A terahertz-wave generating element of a Cerenkov phase-matching type, comprising:
- a waveguide including an electro-optic crystal;
- and
- an optical coupling member that guides a terahertz wave, which is generated from the electro-optic crystal as a result of light propagating through the waveguide, from the waveguide to a space,
- wherein the waveguide has a waveguide structure that confines the light in a first direction, which is perpendicular to a propagating direction of the light and in which the waveguide and the optical coupling member are arranged, and in a second direction, which is perpendicular to the propagating direction of the light and the first direction, and
- wherein the waveguide is configured to confine, in the second direction, the light within a range having a width smaller than a width of the optical coupling member.
(canceled)
A terahertz-wave generating element of a Cerenkov phase-matching type, comprising:
- a substrate;
- a waveguide arranged on the substrate and including an electro-optic crystal;
- and
- an optical coupling member that guides a terahertz wave, which is generated from the electro-optic crystal as a result of light propagating through the waveguide, from the waveguide to a space,
- wherein the waveguide has a waveguide structure that confines the light in a first direction which is perpendicular to a propagating direction of the light and a substrate surface, on which the waveguide is arranged, of the substrate, and in a second direction which is perpendicular to the propagating direction of the light and the first direction, and
- wherein the waveguide is configured to confine, in the second direction, the light within a range having a width smaller than a width of the optical coupling member.
A terahertz-wave generating element, comprising:
- a waveguide including an electro-optic crystal;
- and
- an optical coupling member wherein a refractive index of light in the electro-optic crystal is smaller than a refractive index of a terahertz wave in the electro-optic crystal,
- wherein the waveguide has a waveguide structure that confines the light in a plurality of directions which are each perpendicular to a propagating direction of the light, and
- wherein, in the optical coupling member, a largest width, in a direction which is perpendicular to a straight line that connects a center of gravity of the waveguide and a center of gravity of the optical coupling member, of at least one cross section among cross sections each perpendicular to the propagating direction of the light is larger than a largest width of a range, in which the light of the waveguide is confined, of the at least one cross section in a direction perpendicular to the straight line.
A terahertz-wave generating element, comprising:
- a waveguide including an electro-optic crystal;
- and
- an optical coupling member
- wherein a refractive index of light in the electro-optic crystal is smaller than a refractive index of a terahertz wave in the electro-optic crystal,
- wherein the waveguide has a waveguide structure that confines the light in a first direction and a second direction which are each perpendicular to a propagating direction of the light and orthogonal to each other, and
- wherein the electro-optic crystal has a portion of which a length in the first direction becomes shorter towards a downstream side in the propagating direction of the light, and a portion of which a length in the second direction is longer than a length of a range, in which the light is confined, in the second direction.
A terahertz-wave generating element, comprising:
- a substrate;
- a waveguide arranged on the substrate and including an electro-optic crystal;
- and
- an optical coupling member,
- wherein a refractive index of light in the electro-optic crystal is smaller than a refractive index of a terahertz wave in electro-optic crystal,
- wherein the waveguide has a waveguide structure that confines the light in a first direction which is perpendicular to a propagating direction of the light and a substrate surface, on which the waveguide is arranged, of the substrate, and in a second direction which is perpendicular to the propagating direction of the light and the first direction, and
- wherein, in the optical coupling member, a largest width, in the second direction, of at least one cross section among cross sections each perpendicular to the propagating direction of the light is larger than a largest width of a range, in which the light of the waveguide is confined, of the at least one cross section in a second direction.
A terahertz-wave generating element, comprising:
- a substrate;
- a waveguide arranged on the substrate and including an electro-optic crystal;
- and
- an optical coupling member,
- wherein a refractive index of light in the electro-optic crystal is smaller than a refractive index of a terahertz wave in the electro-optic crystal,
- wherein the waveguide has a waveguide structure that confines the light in a first direction which is perpendicular to a propagating direction of the light and a surface, which opposes the optical coupling member, of the substrate, and in a second direction which is perpendicular to the propagating direction and the first direction, and
- wherein the electro-optic crystal has a portion of which a length in the first direction becomes shorter towards a downstream side in the propagating direction of the light, and a portion of which a length in the second direction is longer than a length of a range, in which the light is confined, in the second direction.
A terahertz-wave generating element, comprising:
- a waveguide including an electro-optic crystal;
- and
- an optical coupling member
- wherein a refractive index of light in the electro-optic crystal is smaller than a refractive index of a terahertz wave in the electro-optic crystal,
- wherein the waveguide has a waveguide structure that confines the light in a plurality of directions which are each perpendicular to a propagating direction of the light, and
- wherein, in the optical coupling member, a largest width, in each of the directions perpendicular to the propagating direction of the light, of at least one cross section among cross sections each perpendicular to the propagating direction of the light is larger than a largest width of a range, in which the light of the waveguide is confined, in the each of the directions.
A terahertz-wave generating element, comprising:
- a waveguide including an electro-optic crystal;
- and
- a silicon lens,
- wherein a refractive index of light in the electro-optic crystal is smaller than a refractive index of a terahertz wave in the electro-optic crystal,
- wherein the waveguide has a waveguide structure that confines the light in a first direction and a second which are each perpendicular to a propagating direction of the light and orthogonal to each other, and
- wherein the silicon lens has a portion of which a length in the first direction becomes shorter towards a downstream side in the propagating direction of the light, a portion of which a length in the second direction is longer than a length of a range, in which the light is confined, in the second direction.
A terahertz-wave generating element, comprising:
- a substrate;
- a waveguide arranged on the substrate and including an electro-optic crystal;
- and
- a silicon lens,
- wherein a refractive index of light in the electro-optic crystal is smaller than a refractive index of a terahertz wave in the electro-optic crystal,
- wherein the waveguide has a waveguide structure that confines the light in a first direction which is perpendicular to a propagating direction of the light and a surface, which opposes the silicon lens, of the substrate, and in a second direction which is perpendicular to the propagating direction of light and the first direction, and
- wherein the silicon lens has a portion of which a length in the first direction becomes shorter towards a downstream side in the propagating direction of the light, and a portion of which a length in the second direction is longer than a length of a range, in which the light is confined, in the second direction.
Dependencies are inferred from the claim text.