Method and system for throughput determination of a semiconductor manufacturing tool

A system for measuring a throughput of a semiconductor manufacturing tool, comprising:

• a memory storing a computer program;
• and
• a processor configured to execute the computer program, wherein the computer program is configured to:
• receive a layout of the semiconductor manufacturing tool as an input;
• calculate a full capacity number (FCN) based on a number of a plurality of wafer-receiving slots disposed in at least one component of the semiconductor manufacturing tool;
• determine a number of a plurality of wafers to be processed by the semiconductor manufacturing tool based on the FCN;
• determine a path for the wafers to enter stages of the semiconductor manufacturing tool based on at least one parameter;
• determine a time for one of the wafers to enter at least one of the wafer-receiving slots based on a feedback value, wherein the feedback value represents a time at which the at least one wafer-receiving slot is available to receive the one of the wafers;
• and
• determine a process completion time based on the determined time for the one of the wafers to enter the at least one of the wafer-receiving slots, wherein the process completion time indicates a total time taken by the semiconductor manufacturing tool to process and output the plurality of wafers.

A computer program product for measuring a throughput of a semiconductor manufacturing tool, the computer program product comprising a computer readable storage medium having program instructions embodied therewith, the program instructions executable by a processor to cause the processor to:

• receive a layout of the semiconductor manufacturing tool as an input;
• calculate a full capacity number (FCN) based on a number of a plurality of wafer-receiving slots disposed in at least one component of the semiconductor manufacturing tool;
• determine a number of a plurality of wafers to be processed by the semiconductor manufacturing tool based on the FCN;
• determine a path for the wafers to enter stages of the semiconductor manufacturing tool based on at least one parameter;
• determine a time for one of the wafers to enter at least one of the wafer-receiving slots based on a feedback value, wherein the feedback value represents a time at which the at least one wafer-receiving slot is available to receive the one of the wafers;
• and
• determine a process completion time based on the determined time for the one of the wafers to enter the at least one of the wafer-receiving slots, wherein the process completion time indicates a total time taken by the semiconductor manufacturing tool to process and output the plurality of wafers.