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US 2017/0016787 A9Published application
Mems capacitive pressure sensor
Assigneeams International AG
InventorsWillem Frederik Adrianus Besling, Martijn Goossens, Jozef Thomas Martinus van Beek, Peter Gerard Steeneken, Olaf Wunnicke
Life of this patent
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Abstract
A pressure sensor measures pressure by measuring the deflection of a MEMS membrane using a capacitive read-out method. There are two ways to implement the invention. One involves the use of an integrated Pirani sensor and the other involves the use of an integrated resonator, to function as a reference pressure sensor, for measuring an internal cavity pressure.
Claims16
A pressure sensor, comprising:
- a first pressure sensor element comprising a capacitive MEMS pressure sensor having a deformable top electrode, and a fixed bottom electrode spaced by a first cavity portion, wherein the top electrode deforms in response to a pressure to be sensed;
- and
- a second pressure sensor element housed within a second cavity portion, wherein the second cavity portion has a rigid top cover, wherein the first and second cavity portions are connected to define a combined sealed cavity,
- wherein the sensor further comprises means for combining the first and second pressure sensor element outputs, such that the second pressure sensor element output provides calibration of the first pressure sensor output.
1 more element
A method of operating a pressure sensor, comprising:
- measuring an external pressure using a first pressure sensor element comprising a capacitive MEMS pressure sensor having a deformable top electrode, and a fixed bottom electrode spaced by a first cavity portion, wherein the top electrode deforms in response to a pressure to be sensed;
- measuring an internal cavity pressure using a second pressure sensor element housed within a second cavity portion, wherein the first and second cavity portions are connected to define a combined sealed cavity;
- combining the external and internal pressure measurements, such that the second pressure sensor element output provides calibration of the first pressure sensor output.
A method of manufacturing a pressure sensor, comprising:
- forming a first pressure sensor element comprising a capacitive MEMS pressure sensor having a deformable top electrode, and a fixed bottom electrode spaced by a first cavity portion;
- forming a second pressure sensor element housed within a second cavity portion, and forming a rigid top cover over the second cavity portion;
- and
- connecting the first and second cavity portions to define a combined sealed cavity.
1 more element
Dependencies are inferred from the claim text.