Micromechanical sound transducer system and a corresponding manufacturing method
AssigneeRobert Bosch GmbH
InventorsChristoph SCHELLING, Michael STUMBER, Benedikt STEIN, Theresa LUTZ, Rolf SCHEBEN
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AssigneeRobert Bosch GmbH
InventorsChristoph SCHELLING, Michael STUMBER, Benedikt STEIN, Theresa LUTZ, Rolf SCHEBEN
Estimating the term…
A micromechanical sound transducer system and a corresponding manufacturing method, in which the micromechanical sound transducer system includes a substrate having a front side and a back side, the substrate having a through opening extending between the back side and the front side, and a coil configuration on the front side having a coil axis, which runs essentially parallel to the front side, the coil configuration covering the through opening at least partially. Also provided is a magnet device, which is situated so as to allow for an axial magnetic flux to be generated through the coil configuration. The coil configuration has a winding device which has at least first winding sections made from at least one layer of a low-dimensional conductive material, the coil configuration being configured to inductively detect and/or generate sound.
1-15. (canceled)
A micromechanical sound transducer system, comprising:
A method for manufacturing a micromechanical sound transducer system, the method comprising:
Dependencies are inferred from the claim text.