Microelectromechanical microphone having a stationary inner region

A microelectromechanical microphone, comprising:

• a stationary plate defining multiple openings;
• and
• a movable plate defining an outer portion and an inner opening substantially centered at a geometric center of the movable plate,
• the movable plate is mechanically coupled to the stationary plate via dielectric members extending from a surface of the stationary plate to a surface of the movable plate in a vicinity of a geometrical center of the movable plate.

A device, comprising:

• a microelectromechanical microphone including:
• a substrate defining an opening configured to receive an acoustic wave;
• a stationary plate mechanically coupled to the substrate and defining multiple openings;
• and
• a movable plate defining an outer portion and a second opening substantially centered at geometric center of the movable plate,
• the movable plate is rigidly attached to the stationary plate via a hollow member extending from a surface of the stationary plate to a surface of the movable plate in a vicinity of the second opening;
• and
• a circuit coupled to the microelectromechanical microphone and configured to receive a signal indicative of a capacitance between the stationary plate and the movable plate, the signal is representative of an amplitude of the acoustic wave.