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US 2017/0012604 A1Published application
Vibrator and manufacturing method therefor, oscillator, electronic device, and movable body
AssigneeSeiko Epson Corporation
InventorTakahiko YOSHIZAWA
Life of this patent
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Abstract
A vibrator includes a substrate, an electrode located on the substrate, a vibrating piece, an interconnect that includes a first joining portion surrounding the electrode on the substrate and is connected to the vibrating piece and electrically connected to the electrode, and a lid portion that has an opening for exposing the electrode and is joined to the first joining portion.
Claims16
A vibrator comprising:
- a substrate;
- a first electrode located on the substrate;
- a vibrating piece;
- a first interconnect that includes a first joining portion surrounding the first electrode on the substrate and is connected to the vibrating piece and electrically connected to the first electrode;
- and
- a lid portion that has an opening for exposing the first electrode and is joined to the first joining portion.
3 more elements
A method for manufacturing a vibrator, comprising:
- (a) forming a first electrode on a substrate;
- (b) forming a first interconnect that includes a first joining portion surrounding the first electrode on the substrate and is electrically connected to the first electrode;
- (c) forming a vibrating piece that is connected to the first interconnect;
- and
- (d) joining a lid portion that has an opening for exposing the first electrode to the first joining portion.
2 more elements
Dependencies are inferred from the claim text.