Oscillation device and physical quantity sensor
AssigneeDenso Corporation
InventorsTakeru KANAZAWA, Minekazu SAKAI
Life of this patent
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Abstract
An oscillation device includes a vibrator made of a quartz substrate, a vibration substrate coupled to the vibrator and including a peripheral portion surrounding a periphery of the vibrator, a support substrate jointed to the vibration substrate at the peripheral portion of the vibration substrate, a cap layer disposed on an opposite side of the vibration substrate from the support substrate and jointed to the vibration substrate at the peripheral portion of the vibration substrate via a joint. At least one pad electrically connected to the vibration substrate is formed on the cap layer. At least one conductor pattern opposed to the pad is formed on a vibration substrate side surface of the cap layer and is electrically connected to the pad.
Claims22
An oscillation device comprising:
- a vibrator made of a quartz substrate and configured to vibrate based on voltage application;
- a vibration substrate coupled to the vibrator and including a peripheral portion surrounding a periphery of the vibrator;
- a support substrate jointed to the vibration substrate at the peripheral portion of the vibration substrate;
- a cap layer disposed on an opposite side of the vibration substrate from the support substrate, jointed to the vibration substrate at the peripheral portion of the vibration substrate via a joint, and provided with at least one pad electrically connected to the vibration substrate;
- and
- at least one conductor pattern opposed to the pad, formed on a vibration substrate side surface of the cap layer, and electrically connected to the pad.
An oscillation device comprising:
- a vibrator made of a quartz substrate and configured to vibrate based on voltage application;
- a vibration substrate coupled to the vibrator and including a peripheral portion surrounding a periphery of the vibrator;
- a support substrate jointed to the vibration substrate at the peripheral portion of the vibration substrate;
- a cap layer disposed on an opposite side of the vibration substrate from the support substrate, jointed to the vibration substrate at the peripheral portion of the vibration substrate via a metal joint, and provided with at least one pad electrically connected to the vibration substrate;
- and
- an electric charge extraction wiring connected to the metal joint to extract electric charges in the metal joint.
An oscillation device comprising:
- a vibrator made of a quartz substrate and configured to vibrate based on voltage application;
- a vibration substrate coupled to the vibrator and including a peripheral portion surrounding a periphery of the vibrator;
- a support substrate jointed to the vibration substrate at the peripheral portion of the vibration substrate;
- a cap layer disposed on an opposite side of the vibration substrate from the support substrate, jointed to the vibration substrate at the peripheral portion of the vibration substrate via a joint, and provided with at least one pad electrically connected to the vibration substrate;
- and
- a groove formed on each of a first surface and a second surface of the cap layer, wherein the first surface of the cap layer faces the vibration substrate and is opposite to the second surface, wherein the groove is disposed on an inside of the joint and surrounds the pad.
Dependencies are inferred from the claim text.