Mask Pellicle Indicator for Haze Prevention
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKuan-Wen Lin, Sheng-Chi Chin, Ting-Hao Hsu, Tzu-Ting Chou, Shu-Hsien Wu
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Abstract
A pellicle mask assembly includes a mask, a pellicle frame, and a pellicle membrane. The pellicle frame has a bottom side attached to the mask, and a top side covered by the pellicle membrane. The pellicle frame includes a coating on its inner surface and the coating is configured to monitor a change of environment inside the pellicle mask assembly. In embodiments, the change of environment includes increased humidity and/or increased chemical ion density inside the pellicle mask assembly. Methods of making and using the pellicle mask assembly are also disclosed.
Claims20
An apparatus in semiconductor manufacturing, comprising:
- a mask;
- a pellicle frame having a bottom side and a top side, wherein the bottom side is attached to the mask;
- and
- a pellicle membrane covering the top side of the pellicle frame,
- wherein the mask, the pellicle frame, and the pellicle membrane form a mask assembly, and wherein the pellicle frame includes a coating on its inner surface and the coating is configured to monitor a change of environment inside the mask assembly.
A method, comprising the steps of:
- receiving a mask with an integrated circuit (IC) design layout;
- receiving a pellicle frame having a top side and a bottom side;
- forming an indicator on an inner surface of the pellicle frame;
- attaching a pellicle membrane on the top side of the pellicle frame;
- and
- attaching the mask to the bottom side of the pellicle frame, wherein the pellicle membrane, the pellicle frame, and the mask form a mask assembly, and wherein the indicator is configured to detect different levels of humidity or chemical ion density inside the mask assembly.
A method, comprising:
- receiving a mask, a pellicle frame, and a pellicle membrane;
- coating an inner surface of the pellicle frame with a first material to form an indicator;
- and
- joining the mask, the pellicle frame, and the pellicle membrane thereby forming a mask assembly, wherein the indicator is operable to detect different levels of humidity inside the mask assembly by displaying different colors in response thereto.
Dependencies are inferred from the claim text.