Piezoelectric device, liquid ejection head, and liquid ejection apparatus
AssigneeSeiko Epson Corporation
InventorsMotoki TAKABE, Shiro YAZAKI, Yuma FUKUZAWA, Eiju HIRAI
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AssigneeSeiko Epson Corporation
InventorsMotoki TAKABE, Shiro YAZAKI, Yuma FUKUZAWA, Eiju HIRAI
Estimating the term…
An empty chamber component includes a pressure chamber formation substrate where a pressure chamber as an empty chamber is defined and a communication substrate bonded to the pressure chamber formation substrate. A piezoelectric element is provided on one side of the pressure chamber formation substrate. A flexible surface is located between the piezoelectric element and the pressure chamber. Empty portions are defined by the communication substrate closing recessed portions in the pressure chamber formation substrate. The empty portions are formed at positions where ends of the active section of the piezoelectric element pass through the empty portions in plan view.
A piezoelectric device comprising:
Dependencies are inferred from the claim text.