Back to results
US 2017/0001306 A1Published application
Piezoelectric drive device, robot, and method for driving piezoelectric drive device
AssigneeSeiko Epson Corporation
InventorsYutaka ARAKAWA, Akio KONISHI, Yasuharu HASHIMOTO, Osamu MIYAZAWA, Tomohisa IWAZAKI, Yuichiro TSUYUKI
Life of this patent
Estimating the term…
Abstract
A piezoelectric drive device includes a vibrating body, a support portion formed integrally with the vibrating body, and a piezoelectric element formed of a first electrode film, a piezoelectric body film, and a second electrode film on at least one surface of the vibrating body.
Claims20
A piezoelectric drive device comprising:
- a vibrating body;
- a support portion formed integrally with the vibrating body;
- and
- a piezoelectric element formed of a first electrode film, a piezoelectric body film, and a second electrode film on at least one surface of the vibrating body.
1 more element
Dependencies are inferred from the claim text.