Textured membrane for a multi-chamber carrier head
AssigneeApplied Materials, Inc.
InventorsJeonghoon Oh, Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas B. Brezoczky
Life of this patent
Estimating the term…
Abstract
A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.
Claims19
1-17. (canceled)
A method of making a flexible membrane for a carrier head, comprising:
- curing a material in a mold to form the flexible membrane having a flap, the mold having a pattern so that a flap on the flexible membrane has a complementary pattern that includes a plurality of protrusions.
(canceled)
An article for use in a carrier head, comprising:
- a flexible membrane having a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to a base assembly, wherein the flap has a horizontal first portion and second portion extending downwardly from the horizontal portion to the main portion, wherein the flap has a protrusion projecting from a surface of the flap, and wherein the protrusion extends along the first portion and the second portion and across a connection between the first portion and the second portion.
A flexible membrane for a carrier head of a chemical mechanical polishing system, comprising:
- a generally circular main portion with an upper surface and a lower surface to provide a mounting surface for a substrate;
- an outer annular portion extending upwardly from an outer edge of the main portion, the outer annular portion including a rim to contact and be clamped to the carrier head;
- and
- an annular flap extending upwardly from the upper surface of the main portion at a position spaced inwardly from the outer edge, the annular flap having an edge portion to contact and be clamped to the carrier head,
- wherein the membrane includes a flexible and elastic polymer material and a bulk viscoelastic extractable, the bulk viscoelastic extractable comprising no more than 7% of the membrane by weight.
Dependencies are inferred from the claim text.