Bubble removing unit and substrate treating apparatus including the same
AssigneeSemes Co., Ltd.
InventorsJaehyeok YU, Jae-Youl KIM, Oh Jin KWON
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AssigneeSemes Co., Ltd.
InventorsJaehyeok YU, Jae-Youl KIM, Oh Jin KWON
Estimating the term…
A bubble removing unit is disclosed including a body having an inner space, through which a liquid flows, in an interior thereof, a liquid introducing pipe through which the liquid is supplied to the body, a liquid discharging pipe through which the liquid, from which bubbles are removed, is discharged from the body, a bubble discharging pipe through which the bubbles are discharged from the inner space, and a rod-shaped bar situated in the inner space and a length of which extends in a lengthwise direction of the body, wherein a variable cross-section part situated between the liquid introducing pipe and the liquid discharging pipe and a cross-section of which varies along the lengthwise direction of the body is provided in the inner space of the body.
A bubble removing unit comprising:
An apparatus for treating a substrate, the apparatus comprising:
Dependencies are inferred from the claim text.