Apparatus for monitoring vacuum ultraviolet and plasma process equipment including the same

Plasma process equipment, comprising:

• a process chamber having an inner space in which plasma is generated to treat a substrate, the process chamber having a window through which plasma emission light generated from the plasma is transmitted outward;
• and
• a vacuum ultraviolet-monitoring apparatus adjacent to the window, the vacuum ultraviolet-monitoring apparatus to selectively monitor vacuum ultraviolet, having a predetermined wavelength band, of the plasma emission light transmitted through the window,
• the vacuum ultraviolet-monitoring apparatus including:
• a light controller including a slit to transmit the plasma emission light;
• a light selector adjacent to the light controller, the light selector to selectively transmit the vacuum ultraviolet, having the predetermined wavelength band, of the plasma emission light passing through the slit;
• a light collector to concentrate the vacuum ultraviolet selectively transmitted by the light selector;
• and
• a detector to detect the vacuum ultraviolet concentrated by the light collector.

An apparatus for monitoring vacuum ultraviolet, comprising:

• a monitoring chamber having an inner process in a vacuum and having a connecting port connected to a first sidewall of the monitoring chamber, the connecting port including a first connecting port and a second connecting port aligned with each other in a first direction;
• a light controller between the first and second connecting ports, the light controller including a slit to transmit incident light;
• a light selector adjacent to the light controller in the first connecting port, the light selector to selectively transmit light, having a predetermined wavelength band, of the incident light passing through the slit;
• a light collector to concentrate the light selectively transmitted by the light selector;
• and
• a detector to detect the light concentrated by the light collector,
• the light selectively transmitted by the light selector being vacuum ultraviolet.