# US 2016/0355433 A1 · Highly homogeneous glass-ceramic component

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 2016/0355433 A1
- Document ID: US20160355433A1
- Status: Published application
- Kind: A1
- Application number: 15/243,078
- Filed: 2016-08-22
- Published: 2016-12-08
- Earliest claimed: 2014-02-21
- Assignees: Schott AG
- Applicants: Schott AG
- Inventors: Ralf JEDAMZIK; Steffan GRÜN; Thomas LIFKA; Johann FADERL
- Web page: https://patentgrep.com/patent/US20160355433A1

## CPC

- C03C 10/0027: {containing SiO2, Al2O3, Li2O as main constituents}
- C03B 32/02: Thermal crystallisation, e.g. for crystallising glass bodies into glass-ceramic articles {(C03B27/012 takes precedence)}
- C03C 1/00: Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels
- C03C 3/097: containing phosphorus, niobium or tantalum
- G02B 7/181: {with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation}
- G03F 1/22: Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
- G03F 1/60: Substrates
- C03C 2204/00: Glasses, glazes or enamels with special properties
- C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03B: MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

## Abstract

A glass-ceramic component is provided that has a low average coefficient of thermal expansion (CTE) and a high CTE homogeneity. The use of such a component and a process for producing such a component are also provided.

## Claims

### Claim 1

A low thermal expansion glass-ceramic component, comprising, at an application temperature has a coefficient of thermal expansion (CTE) in an interval of 0±20 ppb/K, and a CTE homogeneity of at most 5 ppb/K.

### Claim 2 (depends on 1)

The glass-ceramic component according to claim 1, wherein the interval is 0±10 ppb/K.

### Claim 3 (depends on 1)

The glass-ceramic component according to claim 1, whereas the application temperature lies within in a range of −60° to 100° C.

### Claim 4 (depends on 1)

The glass-ceramic component according to claim 1, whereas the application temperature is selected from the group consisting of 22° C., 30° C., 40° C., 60° C., 80° C., and 100° C.

### Claim 5 (depends on 1)

The glass-ceramic component according to claim 1, further comprising a temperature interval that satisfies a CTE tolerance of 0±10 ppb/K has at least an extent of 10 K.

### Claim 6 (depends on 1)

The glass-ceramic component according to claim 1, wherein the component has a rectangular base with edge lengths of, in each case, at least 100 mm and a thickness of at least 5 mm.

### Claim 7 (depends on 1)

The glass-ceramic component according to claim 1, wherein the component has a mass of at least 500 kg.

### Claim 8 (depends on 1)

The glass-ceramic component according to claim 1, wherein the component has a rectangular shape with at least one surface having a surface area of at least 1 m2.

### Claim 9 (depends on 1)

The glass-ceramic component according to claim 1, wherein the component comprises an LAS glass-ceramic with the following composition (in % by weight based on oxide):
SiO2
50-70,
Al2O3
17-32,
P2O5
3-12,
Li2O
2-5,
Na2O
0-2,
K2O
0-2,
MgO
0-2,
CaO
0-4,
BaO
0-5,
SrO
0-2,
ZnO
0-4,
TiO2
1-5, and
ZrO2
0-5.

### Claim 10 (depends on 1)

The glass-ceramic component according to claim 1, wherein the component comprises a glass-ceramic with an OH content of at least 0.06 mol/l.

### Claim 11 (depends on 1)

The glass-ceramic component according to claim 1, wherein the component is a component for use in a field selected from the group consisting of astronomy, metrology, LCD lithography, microlithography, and precision measurement technology.

### Claim 12 (depends on 1)

A process for producing the glass-ceramic component according to claim 1, comprising the steps of:
melting of a green body;
casting of the green body; and
ceramization of the green body to form a glass-ceramic.

### Claim 13

An astronomical mirror comprising a low thermal expansion glass-ceramic component, that, at an application temperature has a coefficient of thermal expansion (CTE) in an interval of 0±20 ppb/K, and a CTE homogeneity of at most 5 ppb/K.

### Claim 14

An extreme ultraviolet lithography device comprising a low thermal expansion glass-ceramic component, that, at an application temperature has a coefficient of thermal expansion (CTE) in an interval of 0±20 ppb/K, and a CTE homogeneity of at most 5 ppb/K.

### Claim 15 (depends on 14)

The device according to claim 14, wherein the extreme ultraviolet lithography device is a mask or a mirror.