System and a method for automatic recipe validation and selection
AssigneeCamtek Ltd.
InventorsShimon Koren, Or Shur
Life of this patent
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Abstract
A system, a non-transitory computer program product and a method for selecting an inspection recipe, the method includes: (i) obtaining an image of a structural element of the semiconductor device; (ii) calculating multiple types of distances between the image of the structural element and each of a plurality of reference images obtained by applying a plurality of inspection recipes; and (iii) automatically selecting at least one selected inspection recipe out of the plurality of inspection recipes based on values of the multiple types of distances.
Claims21
A method for selecting an inspection recipe, the method comprises:
- obtaining an image of a structural element of the semiconductor device;
- calculating, by a processor, multiple types of distances between an image of the structural element and each of a plurality of reference images obtained by applying a plurality of inspection recipes;
- wherein the multiple types of distances are calculated by using different algorithms;
- wherein different inspection recipes of the plurality of inspection recipes are optimized for different conditions of the semiconductor device;
- wherein each reference image is associated with an inspection recipe before the obtaining of the image of the structural element;
- and
- automatically selecting, by the processor, at least one selected inspection recipe out of the plurality of inspection recipes based on values of the multiple types of distances.
An inspection system, comprising:
- an image obtaining module that is adapted to obtain an image of a structural element of the semiconductor device;
- a processor that comprises:
- a distance calculator that is adapted to calculate multiple types of distances between the image of the structural element and each of a plurality of reference images;
- wherein the multiple types of distances are calculated by using different algorithms;
- wherein the plurality of reference images are obtained by applying a plurality of inspection recipes;
- wherein different inspection recipes of the plurality of inspection recipes are optimized for different conditions of the semiconductor device;
- wherein each reference image is associated with an inspection recipe before the obtaining of the image of the structural element;
- and
- a selecting module that is adapted to automatically select at least one selected inspection recipe out of the plurality of inspection recipes based on values of the multiple types of distances.
- a controller that is adapted to control the image obtaining module to apply each of the at least one selected inspection recipe.
A computer program product comprising a non-transient computer readable medium that stores instructions that cause a processor to execute a method that comprises:
- obtaining an image of a structural element of the semiconductor device;
- calculating multiple types of distances between an image of the structural element and each of a plurality of reference images obtained by applying a plurality of inspection recipes;
- wherein the multiple types of distances are calculated by using different algorithms;
- wherein different inspection recipes of the plurality of inspection recipes are optimized for different conditions of the semiconductor device;
- wherein each reference image is associated with an inspection recipe before the obtaining of the image of the structural element;
- and automatically selecting at least one selected inspection recipe out of the plurality of inspection recipes based on values of the multiple types of distances.
Dependencies are inferred from the claim text.