Method and apparatus for producing micro-array substrate
AssigneesGachon University of Industry-Academic Cooperation Foundation, Gil Medical Center
InventorsYoung Soo YOON, Seung Hyun JEE, Seon Tae KIM
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Abstract
The present invention relates to a method of manufacturing a microarray substrate having improved reliability and mass-production properties using a vapor of a surface-reforming material, and the method of manufacturing the microarray substrate according to the present invention includes washing a base substrate, supplying the vapor of the surface-reforming material into a container to which the base substrate is provided, and coupling the vapor of the surface-reforming material to a surface of the base substrate to form a self-assembed monolayer.
Claims11
A method of manufacturing a microarray substrate, comprising:
- washing a base substrate;
- supplying a vapor of a surface-reforming material into a container to which the base substrate is provided;
- and
- coupling the vapor of the surface-reforming material to a surface of the base substrate to form a self-assembed monolayer.
An apparatus for manufacturing a microarray substrate, comprising:
- a container receiving a base substrate;
- a gas supply tube connected to a gas distributor provided at one side of the container;
- a bubbler connected to the gas supply tube and receiving a surface-reforming material in a liquid phase;
- a carrier gas supply unit supplying an inert gas into the surface-reforming material in the liquid phase;
- and
- a discharge portion provided at another side of the container,
- wherein a self-assembed monolayer including the surface-reforming material is formed on a surface of the base substrate using a vapor of the surface-reforming material supplied by the inert gas.
Dependencies are inferred from the claim text.