Back to results
US 2016/0288155 A1Published application
Vaporizing system
AssigneeKabushiki Kaisha Toshiba
InventorsMari KUSUNOKI, Shinji MIYAZAKI
Life of this patent
Estimating the term…
Abstract
According to one embodiment, a vaporizing system comprises first and second tanks that can accumulate liquid source and first, second, and third pipes. The first pipe allows first gas to be sent out of the first tank. The second pipe allows second gas to be sent out of the second tank. The third pipe is connected to the first and second pipes and allows the first and second gas to be sent out to an external apparatus. The first tank is placed on an upper side of the second tank in a stacked manner.
Claims20
A vaporizing system comprising:
- a first tank that can accumulate liquid source;
- a second tank that can accumulate the liquid source;
- a first pipe to send first gas generated by the liquid source vaporizing in the first tank out of the first tank therethrough;
- a second pipe to send second gas generated by the liquid source vaporizing in the second tank out of the second tank therethrough;
- and
- a third pipe connected to the first and second pipes and to send out the first and second gas to an external apparatus therethrough,
- wherein the first tank is placed on an upper side of the second tank in a stacked manner.
4 more elements
Dependencies are inferred from the claim text.