Improved Ways to Generate Plasma in Continuous Power Mode for Low Pressure Plasma Processes

Coating method comprising the steps of:

• introducing a substrate comprising a surface to be coated in a low-pressure reaction chamber,
• exposing said surface to a plasma comprising one or more monomers 5 that can be polymerized during a treatment period within said reaction chamber,
• applying a power input,
• wherein the power input is continuously strictly higher than zero Watt (W) during said treatment period and whereby said power input subsequently reaches a first upper limit power, a lower limit power and a second upper limit power, said first and said second upper limit power strictly larger than said lower limit power, thereby ensuring a stable plasma ignition to obtain a substrate with a plasma coated surface.

Coating method comprising the steps of:

• introducing a substrate comprising a surface to be coated in a low-pressure reaction chamber,
• exposing said surface to a plasma comprising one or more monomers that can be polymerized during a treatment period within said reaction chamber,
• applying a power input,
• wherein the power input is continuously strictly higher than zero Watt (W) during said treatment period and comprises at least a lower limit power and at least an upper limit power strictly larger than said lower limit power, and in that a power sequence of changing between upper limit power and lower limit power is repeated during the treatment period, thereby ensuring a stable plasma ignition to obtain a substrate with a plasma coated surface.